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2025-03

Application of atmospheric preconcentrator and GC-MS combination in semiconductor manufacturing enterprises

The combination of an atmospheric preconcentrator and gas chromatography-mass spectrometry (GC-MS) has 2 main applications in semiconductor factories: 1. During semiconductor manufacturing, gaseous molecular contaminants in cleanrooms can deposit on the wafer surface, affecting device performance and yield.
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Application of atmospheric preconcentrator and GC-MS combination in semiconductor manufacturing enterprises
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